Integrated-optic interferometric microdisplacement sensor in glass with thermo-optic phase modulation

摘要

A compact and stable integrated-optic Michelson-interferometer for 0.633 mu m wavelength operation with ion exchanged waveguides in glass is demonstrated for optical displacement measurement. The integration of thermo-optic modulators allows the combined detection of fast movement with orthogonal signals, and high-resolution (1 nm) displacement detection with optical heterodyning.