Design and fabrication of ultra-small overlapped AWG demultiplexer based on /spl alpha/-Si nanowire waveguides

摘要

A novel layout for an ultra-compact arrayed-waveguide grating (AWG) demultiplexer is presented. The present layout has two overlapped free propagation regions, and is more compact than a conventional layout. Using /spl alpha/Si-on-SiO/sub 2/ nanowire waveguides, an ultra-small 4/spl times/4 AWG (about 40/spl times/50 /spl mu/m/sup 2/) with channel spacing of 11 nm is fabricated and characterised.