3-D Printing as an Effective Educational Tool for MEMS Design and Fabrication

摘要

This paper presents a series of course modules developed as a high-impact and cost-effective learning tool for modeling and simulating the microfabrication process and design of microelectromechanical systems (MEMS) devices using three-dimensional (3-D) printing. Microfabrication technology is an established fabrication technique for small and high-precision MEMS devices; these processes typically take place in a cleanroom with the use of expensive high-vacuum equipment. These course modules were developed to provide engineering educators a more affordable and effective method for teaching MEMS modeling in settings without a cleanroom, as is the case in many undergraduate institutions. Feedback from student evaluations as well as course grades all support the efficacy of these course modules. In these hands-on modules, by designing and building the MEMS prototypes, the students learn by experiencing the process of building a MEMS device from the specifications given. The results are also compared to similar assessments made in the course before the introduction of these course modules to verify success. The detailed description of the modules, the evaluation methodologies adopted, and reflections on the implementation are discussed.