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Thermal performance of copper vapor chamber with double-sided uniform radial micro-grooved wicks by laser fabrication

机译:用双面均匀径向微沟芯的铜蒸汽室的热性能通过激光制造

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In order to ensure the reliability of high heat-flux electronic devices, vapor chambers with double-sided uniform radial micro-grooved wicks (DURM) are developed. The driving force model of the working liquid inside the DURM vapor chamber is established. To enhance the driving force of the working liquid, the condensation micro-grooves and evaporation micro-grooves of the DURM vapor chamber are fabricated using an ultraviolet laser and an infrared laser, respectively. In addition, the startup characteristics and temperature uniformity of the DURM vapor chamber and the effect of the depth–width ratio and radiation angle of the micro-grooves and the filling ratio of the DURM vapor chamber on its thermal performance are also investigated. The results indicate that the DURM vapor chamber could maintain good temperature uniformity. Both the evaporation micro-grooved and condensation micro-grooved wicks facilitate the enhancement of the thermal performance of the vapor chamber. The double-sided micro-grooved wick with a larger depth–width ratio and a smaller radiation angle improves the thermal performance of the DURM vapor chamber. However, when the radiation angle is lower than 4°, further reducing the radiation angle has little effect on improving the thermal performance. In addition, an appropriate filling ratio helps reduce the thermal resistance of the vapor chamber under a certain heat load.
机译:为了确保高热通量电子器件的可靠性,开发了具有双面均匀径向微沟芯(DURM)的蒸汽室。建立了Durm蒸汽室内的工作液的驱动力模型。为了增强工作液的驱动力,分别使用紫外激光和红外激光制造Durm蒸汽室的冷凝微槽和蒸发微槽。另外,还研究了DURM蒸汽室的启动特性和温度均匀性以及微槽的深度宽度和辐射角的效果以及DURM蒸汽室的填充率对其热性能的填充率。结果表明,Durm蒸汽室可以保持良好的温度均匀性。蒸发微沟和冷凝微沟芯均有助于增强蒸汽室的热性能。具有较大深度宽度比和较小辐射角的双面微沟芯提高了Durm蒸汽室的热性能。然而,当辐射角低于4°时,进一步降低辐射角对提高热性能几乎没有影响。另外,适当的填充率有助于降低蒸汽室在一定热负荷下的热阻。

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