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Behavior of Multi-Cathode-Arrays with differentiated current for the Electro-Chemical Machining

机译:用于电化化工加工的不同电流的多阴极阵列的行为

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ECM Productivity is essentially determined by the current used, and in micromachining, the effective current density limits the magnitude of the current. One way to increase the productivity of the micro ECM is to use multiple cathodes. It must be differentiated whether all cathodes are supplied with one process energy source (PES) or each cathode receives its own PES. The paper firstly shows the main differences between the single and multiple current loads and highlights the problems of multiple current supply. The deciding factor is the transfer impedance between the different cathodes. This impedance is determined by the effective areas of the two cathodes and the impedance of the insulating material. In particular, it must also be noted that the insulation thicknesses are only in the range of a few hundred micrometers. Second, the effects of the parasitic elements on the pulse formation at the cathodes are shown by means of an equivalent circuit. From the results of these simulations, the control parameters and their magnitudes for the synchronization of the PESs are derived. For selected case studies, the influences on the current and voltage pulses of the individual cathodes are shown and necessary regulations are shown. The advantages of the multiple arrangement of cathodes with different current supply is that for the multiple machining higher accuracy can be realized, the productivity increases and very different processing cases can be treated simultaneously.
机译:ECM生产率基本上由所用的电流和微机械线决定,有效电流密度限制了电流的大小。提高微观ECM生产率的一种方法是使用多个阴极。它必须差异化所有阴极是否配有一个处理能量源(PE)或每个阴极接收其自己的PE。本文首先显示了单一和多个电流负载之间的主要差异,并突出了多个电流供应的问题。决定因子是不同阴极之间的传递阻抗。该阻抗由两个阴极的有效面积和绝缘材料的阻抗来确定。特别地,还必须注意,绝缘厚度仅在几百微米的范围内。其次,通过等效电路示出了寄生元件对阴极处的脉冲形成的影响。从这些模拟的结果,导出了控制参数及其对帕塞特同步的幅度。对于所选案例研究,显示了对各个阴极的电流和电压脉冲的影响并显示了必要的规则。具有不同电流供应的阴极多种布置的优点是,对于多种加工更高的精度,可以实现更高的精度,可以同时进行生产率增加,并且可以同时处理非常不同的处理箱。

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