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Laser-fabricated axicons for glass dicing applications

机译:用于玻璃切割应用的激光制造的轴突

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Laser-based fabrication, including the ultrashort laser ablation and the subsequent CO2polishing steps, is a very attractive tool for the complex 2.5D surface structuring, which could be applied for the fabrication of compact optical elements. However, as an alternative to conventional optics, these elements require validation, especially for high power applications, such as material processing. In this contribution, we comprehensively investigate all-laser-fabricated axicons from fused silica. We demonstrate that these elements allow the generation of high-quality Bessel-like optical beam with a long non-diffractive length and could be efficiently applied for 1 mm-thick glass dicing. Furthermore, we show that the asymmetry of the generated intensity pattern could be controlled via axicon tilt operation, which allows generating elongated modifications with the dominant transverse crack propagation direction. As a result, the higher dicing speed with better dicing quality and easier separation is achieved.
机译:基于激光的制造,包括超短的激光烧蚀和随后的CO 2铺设步骤,是用于复合2.5D表面结构的非常有吸引力的工具,其可以应用于制造紧凑的光学元件。然而,作为传统光学元件的替代方案,这些元件需要验证,特别是对于高功率应用,例如材料处理。在这一贡献中,我们全面研究了来自熔融二氧化硅的全激光制造的轴突。我们证明这些元件允许产生具有长的非衍射长度的高质量贝塞尔状光束,并且可以有效地施加1mm厚的玻璃切割。此外,我们表明,产生的强度图案的不对称性可以通过轴的倾斜操作来控制,这允许利用显性横裂裂纹传播方向产生细长修改。结果,实现了具有更好切割质量和更容易分离的更高的切割速度。

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