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Detection and characterization of CO gas using LTCC micro-hotplates

机译:利用LTCC微热检测和表征CO气体

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In the present work, a tin oxide (SnO 2 )-based gas sensor has been fabricated on Low Temperature Co-fired Ceramic (LTCC) substrate by screen printing method for detection of the silent killer gas (carbon monoxide). The tin oxide paste has been prepared for deposition on inter-digitated electrodes patterned on LTCC substrate. The developed gas sensor module has been fired at different temperatures (625, 820 and 860°C) and the effect of firing temperature has been studied. The developed sensor is small in size with low power consumption, better sensitivity and repeatability.
机译:在本作工作中,通过丝网印刷方法在低温共烧陶瓷(LTCC)底物上制造了氧化锡(SnO 2)的气体传感器,用于检测无声杀伤气体(一氧化碳)。已经制备氧化锡糊状物用于沉积在LTCC衬底上图案化的数字间电极上。发达的气体传感器模块已在不同温度下(625,820和860°C)烧制,并研究了烧制温度的效果。开发的传感器的尺寸小,功耗低,灵敏度更好,可重复性。

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