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Electron transport across nanocrystalline diamond films: Field emission and conducting atomic force microscopic investigations

机译:跨纳米晶金刚石薄膜的电子传输:场发射和导电原子力显微调查

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In this paper, we report synthesis of nano-crystalline diamond (n-C diamond) films using DC-plasma assisted hot filament chemical vapor deposition. The films are characterized by Raman spectroscopy, scanning electron microscopy, and atomic force microscopy. The films were found to be uniform and well adherent to crystalline ?100? and ?111? on silicon substrates. Comparative studies were carried out using field emission microscopy and conductive atomic force microcopy to investigate the mechanism of electron transport across the n-C diamond films in far field and near field geometries. The former is important in the context of field emission display devices, and the latter is important as a gate electrode for field effect transistors. The I–V characteristics in both the cases obeyed the Fowler–Nordheim equation. Various parameters, viz., turn-on voltage, threshold voltage, and field enhancement factors, were estimated. The power spectral density of noise in field electron emission current exhibited P(f) = A·I 2 /f 2 behavior. The results are discussed in the light of the present understanding of the mechanism of field emission from n-C diamond films.
机译:本文使用DC等离子体辅助热长丝化学气相沉积报告纳米结晶金刚石(N-C金刚石)膜的合成。薄膜的特征在于拉曼光谱,扫描电子显微镜和原子力显微镜检查。发现薄膜是均匀的,粘附到结晶?100?和?111?在硅基衬底上。使用现场发射显微镜和导电原子力微核经营进行比较研究,以研究远场中的N-C金刚石膜的电子传输机理和近场几何形状。前者在现场发射显示装置的上下文中是重要的,并且后者作为用于场效应晶体管的栅电极很重要。案件的I-V特征遵循了Fowler-Nordheim方程。估计各种参数,VIZ,导通电压,阈值电压和现场增强因子。现场电子发射电流中噪声的功率谱密度表现出p(f)= a·i 2 / f 2行为。鉴于本发明的对来自N-C金刚石薄膜的场发射机理的理解,讨论了结果。

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