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Failure mechanism analysis and experimental study of lead zirconate titanate actuators in piezoelectric micro jetting valve

机译:压电微喷射瓣膜铅锆钛酸盐致动器的失效机理分析及实验研究

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Piezoelectric ceramics have recently become one of the most common materials in electromechanical industries, especially in the microelectronic packaging industry. In a jetting dispenser, the presence of imbalanced stress-induced defects in such materials prevents them from providing high stability during the jetting dispensing process. In this work, lead zirconate titanate piezoelectric ceramics (PZT ceramics) were used to actuate the amplifying mechanism of the jetting dispenser. However, during the cyclic dispensing, several ceramics were found to be damaged. In order to figure out what actually caused the damage, analytical and experimental studies were carried out to acquire characteristics of PZT ceramics with damages, and simulation studies of overstress were also performed. Details of the damage characteristics in PZT ceramics are discussed in this paper. This work will improve the stability and life of the piezoelectric dispenser and further promote its wide application in various fields.
机译:压电陶瓷最近成为机电行业中最常见的材料之一,特别是在微电子包装行业中。在喷射分配器中,这种材料中的不平衡应激诱导的缺陷的存在可防止它们在喷射分配过程中提供高稳定性。在这项工作中,使用铅锆钛酸铅压电陶瓷(PZT陶瓷)致动喷射分配器的放大机理。然而,在循环分配过程中,发现几种陶瓷被损坏。为了弄清楚实际引起的损伤,分析和实验研究进行了损害损坏的特征,并进行了过度光滑的仿真研究。本文讨论了PZT陶瓷中损伤特性的细节。这项工作将提高压电分配器的稳定性和寿命,并进一步促进其在各种领域的广泛应用。

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