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Performance of Cu–Ag Thin Films as Diffusion Barrier Layer

机译:Cu-Ag薄膜作为扩散阻挡层的性能

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It is well-known that Cu–Sn intermetallic compounds are easily produced during reflow process and result in poor reliability of solder bump. Recently, amorphous metallic films have been considered to be the most effective barrier layer because of the absence of grain boundaries and immiscibility with copper. Since Cu–Ag alloys are characterized by their lower electrical resistivity and superior glass-forming ability, they are appropriate to be used as the diffusion barrier layers. In this study, molecular dynamics simulation was performed to investigate the effects of composition ratio and quenching rate on the internal microstructure, diffusion properties, and the strength of the interface between polycrystalline Cu and Cu–Ag barrier layers. The results showed that Cu40Ag60 and Cu60Ag40 present more than 95% of the amorphous at quenching rate between 0.25 and 25 K/ps, indicating a good glass-forming ability. Diffusion simulation showed that a better barrier performance can be achieved with higher amorphous ratio. For the sample of Cu20Ag80 with quenching rate of 25 K/ps, a void is initially generated in amorphous Cu–Ag layer during the tensile test. This indicates the strength of amorphous Cu–Ag is weaker than Cu–Ag/Cu interface and the polycrystalline Cu layer.
机译:众所周知,在回流过程中容易产生Cu-Sn金属间化合物,并导致焊料凸块的可靠性差。最近,由于没有晶界和与铜不混溶的情况,无定形金属膜被认为是最有效的阻挡层。由于Cu-Ag合金的特征在于它们较低的电阻率和优异的玻璃形成能力,因此它们适合用作扩散阻挡层。在该研究中,进行分子动力学模拟以研究组合物比和猝灭率对多晶Cu和Cu-Ag阻挡层之间的内部微观结构,扩散性能和界面强度的影响。结果表明,Cu40Ag60和Cu60Ag40在0.25和25k / ps之间的猝灭速率下呈现超过95%的无定形,表明良好的玻璃形成能力。扩散模拟表明,通过更高的无定形比可以实现更好的阻隔性能。对于具有25k / ps的淬火速率的Cu20Ag80的样品,在拉伸试验期间最初在无定形Cu-Ag层中产生空隙。这表明无定形Cu-Ag的强度弱于Cu-Ag / Cu界面和多晶Cu层。

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