Calibration of an Indexing Table Using a High Precision Angle Comparator

摘要

The calibration of indexing table is important to ensure high accuracy and reliability in angle metrology. In this paper, we present calibrations of an indexing table and uncertainty analysis to evaluate the performance of the high precision angle comparator. The configuration of the angle comparator is explained. In the calibration, a complete closure method is applied to obtain the angle comparator’s position error and the indexing table’s angular deviation simultaneously based on the least square method. The position error of the angle comparator is evaluated to be about 0.08". The calibration result of an indexing table is compatible with that of the manufacturer and National Institute of Metrology of China within the expanded uncertainty of calibration, 0.04".