COMPARISON OF RESULTS OF SURFACE TEXTURE MEASUREMENT OBTAINED WITH STYLUS METHODS AND OPTICAL METHODS

摘要

The results of surface texture measurements obtained with the stylus equipment, white light interferometer and confocal profilometer of the same samples were compared. Machined isotropic and anisotropic surfaces, of symmetric and asymmetric ordinate distribution were measured. Forms were removed using polynomials. Sampling intervals and measuring areas during computations of parameters were the same. Discrepancies between the results obtained with various methods were observed and discussed. It was found that errors of surface texture measurement with the optical methods depend on the type of surface topography.