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Controlled mud-crack patterning and self-organized cracking of polydimethylsiloxane elastomer surfaces

机译:聚二甲基硅氧烷弹性体表面的受控泥裂图案和自组织裂纹

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Exploiting pattern formation – such as that observed in nature – in the context of microanotechnology could have great benefits if coupled with the traditional top-down lithographic approach. Here, we demonstrate an original and simple method to produce unique, localized and controllable self-organised patterns on elastomeric films. A thin, brittle silica-like crust is formed on the surface of polydimethylsiloxane (PDMS) using oxygen plasma. This crust is subsequently cracked via the deposition of a thin metal film – having residual tensile stress. The density of the mud-crack patterns depends on the plasma dose and on the metal thickness. The mud-crack patterning can be controlled depending on the thickness and shape of the metallization – ultimately leading to regularly spaced cracks and/or metal mesa structures. Such patterning of the cracks indicates a level of self-organization in the structuring and layout of the features – arrived at simply by imposing metallization boundaries in proximity to each other, separated by a distance of the order of the critical dimension of the pattern size apparent in the large surface mud-crack patterns.
机译:如果结合传统的自上而下的光刻方法,在微/纳米技术的背景下利用图案形成(例如在自然界中观察到的图案)可能会带来巨大的好处。在这里,我们展示了一种原始而简单的方法,可以在弹性体薄膜上产生独特,局部且可控的自组织图案。使用氧等离子体在聚二甲基硅氧烷(PDMS)的表面上形成了一层薄而脆的二氧化硅状外壳。随后,该外壳会通过沉积具有残余拉伸应力的金属薄膜而破裂。泥裂图案的密度取决于等离子剂量和金属厚度。可以根据金属化层的厚度和形状来控制泥裂缝的图案-最终导致规则间隔的裂缝和/或金属台面结构。裂纹的这种图案表示特征的结构和布局中的自组织程度–只需通过在彼此附近施加金属化边界即可达到,这些边界之间的距离约为图案大小的临界尺寸的数量级。在大的表面有泥裂缝的图案。

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