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APS -APS March Meeting 2017 - Event - A Field Emission Based Electromechanical System for Tunable, High-Resolution Position Sensing

机译:APS -APS 2017年3月会议-活动-基于现场发射的机电系统,用于可调,高分辨率位置传感

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Scanning Probe Microscopy (SPM) techniques like Atomic Force Microscopy and Scanning Tunneling Microscopy opened the doors to direct investigations of the nanoscale world. Pre-dating these technologies, however, was an instrument known as the topografiner, capable of imaging surface topography with nanometer scale vertical resolution. The topografiner utilized a field emission current originating from a sharp metal tip, and so possessed a distinct advantage over conventional SPM by not requiring contact with the sample (operating $sim 20$~nm from the surface). In the end, the DC field emission techniques used in operation and the tip-geometry hindered the potential of the technique to reach atomic-scale resolution. By using a high-aspect-ratio multi-walled carbon nanotube as a field emitter, we achieve vertical displacement sensing with sub-atomic resolution. In our approach, we employ an AC electromechanical coupling technique and demonstrate a position sensitivity of $eta = 5$~pm$/sqrt{Hz}$ while the emitter is located $sim 500$~nm from the surface. The sensitivity of our system has a strong dependence on both the vertical position and the oscillation amplitude of the mechanical resonator, and we discuss how our sensitivity may approach the femtometer regime.
机译:诸如原子力显微镜和扫描隧道显微镜的扫描探针显微镜(SPM)技术为直接研究纳米世界打开了大门。然而,在这些技术之前存在一种称为拓扑嫁接机的设备,该设备能够以纳米级垂直分辨率成像表面形貌。拓扑移植物利用了源自尖锐金属尖端的场发射电流,因此通过不需要与样品接触(从表面操作约20 nm)而具有优于常规SPM的显着优势。最后,在操作中使用的直流场发射技术和尖端几何形状阻碍了该技术达到原子级分辨率的潜力。通过使用高纵横比的多壁碳纳米管作为场发射器,我们实现了具有亚原子分辨率的垂直位移传感。在我们的方法中,我们采用交流机电耦合技术,并证明了位置灵敏度为$ eta = 5 $〜pm $ / sqrt {Hz} $,而发射极位于距表面500〜nm处。我们系统的灵敏度强烈依赖于机械谐振器的垂直位置和振荡幅度,因此我们讨论了灵敏度如何接近飞安计。

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