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>Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection
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Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection
The integration of a 50-nm-thick layer of an innovative sensitive material on microsensors has been developed based on silicon micro-hotplates. In this study, integration of ZnO:Ga via radio-frequency (RF) sputtering has been successfully combined with a low cost and reliable stencil mask technique to obtain repeatable sensing layers on top of interdigitated electrodes. The variation of the resistance of this n-type Ga-doped ZnO has been measured under sub-ppm traces (500 ppb) of acetaldehyde (C 2 H 4 O). Thanks to the microheater designed into a thin membrane, the generation of very rapid temperature variations (from room temperature to 550 °C in 25 ms) is possible, and a rapid cycled pulsed-temperature operating mode can be applied to the sensor. This approach reveals a strong improvement of sensing performances with a huge sensitivity between 10 and 1000, depending on the working pulsed-temperature level.
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机译:基于硅微热板,已经开发了在微传感器上集成50纳米厚的创新敏感材料层。在这项研究中,通过射频(RF)溅射整合ZnO:Ga已成功地与低成本和可靠的模板掩膜技术相结合,以在指状电极的顶部获得可重复的传感层。该n型Ga掺杂ZnO的电阻变化已在乙醛(C 2 H 4 O)的亚ppm痕量(500 ppb)下测量。由于将微加热器设计为薄膜,因此可以产生非常快速的温度变化(在25 ms内从室温到550°C),并且可以将快速循环的脉冲温度操作模式应用于传感器。根据工作脉冲温度水平,这种方法可以显着提高感测性能,灵敏度在10至1000之间。
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