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Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

机译:具有用于蒸汽检测的集成读数的金刚石和硅MEMS传感器阵列的开发

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摘要

This paper reports on the development of an autonomous instrument based on an array of eight resonant microcantilevers for vapor detection. The fabricated sensors are label-free devices, allowing chemical and biological functionalization. In this work, sensors based on an array of silicon and synthetic diamond microcantilevers are sensitized with polymeric films for the detection of analytes. The main advantage of the proposed system is that sensors can be easily changed for another application or for cleaning since the developed gas cell presents removable electrical connections. We report the successful application of our electronic nose approach to detect 12 volatile organic compounds. Moreover, the response pattern of the cantilever arrays is interpreted via principal component analysis (PCA) techniques in order to identify samples.
机译:本文报告了基于八个共振微悬臂梁阵列的自主仪器的开发,该仪器用于蒸汽检测。所制造的传感器是无标签设备,可实现化学和生物功能化。在这项工作中,基于硅和合成金刚石微悬臂阵列的传感器用聚合物膜敏化,以检测分析物。提出的系统的主要优点是,由于开发的气室具有可拆卸的电连接,因此可以轻松地将传感器更改为其他应用或清洁。我们报告了电子鼻方法在检测12种挥发性有机化合物方面的成功应用。此外,悬臂阵列的响应模式通过主成分分析(PCA)技术进行解释,以识别样品。

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