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A Microscale Linear Phased-Array Ultrasonic Transducer Based on PZT Ceramics

机译:基于PZT陶瓷的微型线性相控阵超声换能器

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In this paper, a microscale high-frequency ultrasonic transducer was prepared by combining traditional planar ultrasonic phased-array technology and micro processing technology. The piezoelectric ceramic material PZT was used as the functional material of the transducer. The number of the arrays was 72, the width of each array was 50 μm, the pitch of each array was 70 μm, and the length of each array was 3 mm. The PZT chip was finely ground to a thickness of 130 μm and could reach a frequency of 10 MHz. The experimental platform of micron-scale precision was set up for a beam-forming lateral sound field test and imaging experiment to validate the theoretical analysis. The echo imaging test showed that a mold with a feature size of about 400 μm could be imaged well.
机译:本文结合传统的平面超声相控阵技术和微处理技术,制备了一种微型高频超声换能器。压电陶瓷材料PZT被用作换能器的功能材料。阵列的数目为72,每个阵列的宽度为50μm,每个阵列的间距为70μm,并且每个阵列的长度为3mm。将PZT芯片精细研磨至130μm的厚度,并可以达到10 MHz的频率。建立了微米级精度的实验平台,用于波束形成的横向声场测试和成像实验,以验证理论分析。回波成像测试表明,特征尺寸约为400μm的模具可以很好地成像。

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