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Geometrical Characterisation of a 2D Laser System and Calibration of a Cross-Grid Encoder by Means of a Self-Calibration Methodology

机译:二维激光系统的几何表征和跨网格编码器的自校正方法校准

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This article presents a self-calibration procedure and the experimental results for the geometrical characterisation of a 2D laser system operating along a large working range (50 mm × 50 mm) with submicrometre uncertainty. Its purpose is to correct the geometric errors of the 2D laser system setup generated when positioning the two laser heads and the plane mirrors used as reflectors. The non-calibrated artefact used in this procedure is a commercial grid encoder that is also a measuring instrument. Therefore, the self-calibration procedure also allows the determination of the geometrical errors of the grid encoder, including its squareness error. The precision of the proposed algorithm is tested using virtual data. Actual measurements are subsequently registered, and the algorithm is applied. Once the laser system is characterised, the error of the grid encoder is calculated along the working range, resulting in an expanded submicrometre calibration uncertainty (k = 2) for the X and Y axes. The results of the grid encoder calibration are comparable to the errors provided by the calibration certificate for its main central axes. It is, therefore, possible to confirm the suitability of the self-calibration methodology proposed in this article.
机译:本文介绍了一种自校准程序以及二维激光系统几何特征的实验结果,该二维激光系统在较大的工作范围(50 mm×50 mm)下工作,具有亚微米级的不确定性。其目的是纠正在放置两个激光头和用作反射镜的平面镜时产生的2D激光系统设置的几何误差。此过程中使用的未经校准的伪像是商用栅格编码器,它也是一种测量仪器。因此,自校准程序还允许确定栅格编码器的几何误差,包括其矩形误差。使用虚拟数据测试了所提出算法的精度。随后记录实际测量值,并应用算法。一旦确定了激光系统的特性,便会沿工作范围计算出栅格编码器的误差,从而导致X和Y轴的亚微米校准不确定性扩大(k = 2)。栅格编码器校准的结果与校准证书提供的主轴中心轴误差相当。因此,有可能确认本文提出的自校准方法的适用性。

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