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Miniature Diamond-Based Fiber Optic Pressure Sensor with Dual Polymer-Ceramic Adhesives

机译:带有双聚合物-陶瓷粘合剂的微型基于金刚石的光纤压力传感器

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摘要

Diamond is a good candidate for harsh environment sensing due to its high melting temperature, Young’s modulus, and thermal conductivity. A sensor made of diamond will be even more promising when combined with some advantages of optical sensing (i.e., EMI inertness, high temperature operation, and miniaturization). We present a miniature diamond-based fiber optic pressure sensor fabricated using dual polymer-ceramic adhesives. The UV curable polymer and the heat-curing ceramic adhesive are employed for easy and reliable optical fiber mounting. The usage of the two different adhesives considerably improves the manufacturability and linearity of the sensor, while significantly decreasing the error from the temperature cross-sensitivity. Experimental study shows that the sensor exhibits good linearity over a pressure range of 2.0–9.5 psi with a sensitivity of 18.5 nm/psi (R 2 = 0.9979). Around 275 °C of working temperature was achieved by using polymer/ceramic dual adhesives. The sensor can benefit many fronts that require miniature, low-cost, and high-accuracy sensors including biomedical and industrial applications. With an added antioxidation layer on the diamond diaphragm, the sensor can also be applied for harsh environment applications due to the high melting temperature and Young’s modulus of the material.
机译:钻石具有高熔化温度,杨氏模量和热导率,因此是用于恶劣环境检测的良好选择。当结合光学传感的一些优点(即EMI惰性,高温操作和小型化)时,由金刚石制成的传感器将更有希望。我们介绍了使用双聚合物-陶瓷粘合剂制造的基于金刚石的微型光纤压力传感器。使用紫外线可固化聚合物和热固性陶瓷粘合剂,可轻松可靠地安装光纤。两种不同粘合剂的使用大大改善了传感器的可制造性和线性,同时显着降低了温度交叉敏感度带来的误差。实验研究表明,该传感器在2.0–9.5 psi的压力范围内具有良好的线性度,灵敏度为18.5 nm / psi(R 2 = 0.9979)。使用聚合物/陶瓷双重粘合剂可达到约275°C的工作温度。该传感器可以使许多需要微型,低成本和高精度传感器的领域受益,包括生物医学和工业应用。由于在金刚石膜片上增加了抗氧化层,该传感器还可以由于高熔化温度和材料的杨氏模量而用于恶劣的环境应用。

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