Effects of High-Humidity Aging on Platinum, Palladium, and Gold Loaded Tin Oxide—Volatile Organic Compound Sensors

摘要

This study is an investigation of high-humidity aging effects on the total volatile organic compound (T–VOC) gas-sensing properties of platinum, palladium, and gold-loaded tin oxide (Pt,Pd,Au/SnO₂) thick films. The sensor responses of the high-humidity aged Pt,Pd,Au/SnO₂, a non-aged Pt,Pd,Au/SnO₂, and a high-humidity aged Pt/SnO₂ to T–VOC test gas have been measured. The high-humidity aging is an effective treatment for resistance to humidity change for the Pt,Pd,Au/SnO₂ but not effective for the Pt/SnO₂. The mechanism of the high-humidity aging effects is discussed based on the change of surface state of the SnO₂ particles.