We report on the development of a microelectromechanical systems (MEMS)-scale photoacoustic sensor for the detection of trace gases. A mid-infrared quantum cascade laser (QCL) was used to determine detection limits for acetic acid, acetone, 1,4-dioxane, and vinyl acetate. The source was continuously tunable from 1015 cm−1 to 1240 cm−1, allowing for the collection of photoacoustic vibrational spectra for these gases. Exceptional agreement between the measured photoacoustic spectra and the infrared spectra for acetic acid, acetone, 1,4-dioxane, and vinyl acetate was observed. Partial least-squares (PLS) regression was used to develop an algorithm for classification of these compounds based solely on photoacoustic spectra.
展开▼
机译:我们报告了用于检测痕量气体的微机电系统(MEMS)规模的光声传感器的发展。使用中红外量子级联激光器(QCL)来确定乙酸,丙酮,1,4-二恶烷和乙酸乙烯酯的检测限。该源可连续地从1015 cm -1 sup>调谐到1240 cm -1 sup>,从而可以收集这些气体的光声振动光谱。观察到乙酸,丙酮,1,4-二恶烷和乙酸乙烯酯的光声光谱与红外光谱之间的异常一致性。偏最小二乘(PLS)回归用于开发仅基于光声光谱对这些化合物进行分类的算法。
展开▼