A no-moving-parts-valve (NMPV) with a diffuser width of D = 500 microns was investigated in this study by numerical simulations at Reynolds numbers, ReD, ranging from 20 to 75, and expansion valve angles ranging from 30° < θ1 < 57° and 110° < θ2 < 120°. The Dp,i value, 1.02 < Dp,i < 1.14, is larger within the proposed range of the expansion valve angles. A flow channel structure with a depth of 500 micron is manufactured using yellow light lithography in this study. From prior analyses and experiments, it is found that piezoelectric films work better at a buzz driving frequency of f < 30Hz and the best operating frequency is at a driving frequency of f = 10Hz because it produces the largest net flow. In addition, the expansion angles θ1 = 30° and θ2 = 120° are the best expansion angles because they produce the largest net flow. These related results are very helpful for the actual design of no-moving-parts-valve micro-pump.
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机译：通过在雷诺数Re D （范围从20到75）以及膨胀的数值模拟中研究了扩散器宽度为D = 500微米的无移动阀（NMPV）。气门角范围为30°<θ 1 <57°和110°<θ 2 <120°。 D p ， i 值1.02 ， i <1.14在建议的范围内更大膨胀阀角度。在这项研究中，使用黄光光刻技术制造了深度为500微米的流道结构。从先前的分析和实验中发现，压电薄膜在嗡嗡声驱动频率f <30Hz时效果更好，最佳工作频率在f = 10Hz的驱动频率下，因为它产生的净流量最大。此外，膨胀角θ 1 = 30°和θ 2 = 120°是最佳的膨胀角，因为它们产生最大的净流量。这些相关结果对于不动零件阀微型泵的实际设计非常有帮助。
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