A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.
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机译：提出了一种集成有微加热器的甲醇微传感器，该微加热器使用互补金属氧化物半导体（CMOS）-微机电系统（MEMS）技术制造。该传感器具有检测低浓度甲醇气体的能力。传感器的结构由指状电极，敏感膜和加热器组成。利用位于叉指电极下方的加热器为敏感膜提供工作温度。通过溶胶-凝胶法制备的敏感膜是掺杂二氧化锡的硫化镉，其沉积在叉指电极上。为了获得悬浮结构并沉积敏感膜，传感器需要后CMOS工艺来蚀刻牺牲二氧化硅层和硅衬底。甲醇传感器是电阻型的。读出电路将传感器的电阻变化转换为输出电压。实验结果表明，甲醇传感器的灵敏度为0.18 V / ppm。
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