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Miniature Microring Resonator Sensor Based on a Hybrid Plasmonic Waveguide

机译:基于混合等离子体波导管的微型微环谐振器传感器

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We propose a compact 1-μm-radius microring resonator sensor based on a hybrid plasmonic waveguide on a silicon-on-insulator substrate. The hybrid waveguide is composed of a metal-gap-silicon structure, where the optical energy is greatly enhanced in the narrow gap. We use the finite element method to numerically analyze the device optical characteristics as a biochemical sensor. As the optical field in the hybrid micoring resonator has a large overlap with the upper-cladding sensing medium, the sensitivity is very high compared to other dielectric microring resonator sensors. The compactness of the hybrid microring resonator is resulted from the balance between bending radiation loss and metal absorption loss. The proposed hybrid microring resonator sensors have the main advantages of small footprint and high sensitivity and can be potentially integrated in an array form on a chip for highly-efficient lab-on-chip biochemical sensing applications.
机译:我们基于绝缘体上硅衬底上的混合等离子体波导,提出了一种紧凑的1μm半径微环谐振器传感器。混合波导由金属间隙硅结构组成,在狭窄的间隙中光能大大增强。我们使用有限元方法对作为生化传感器的设备光学特性进行数值分析。由于混合微细谐振器中的光场与上覆层感测介质有很大的重叠,因此与其他介电微环谐振器传感器相比,灵敏度非常高。混合微环谐振器的紧凑性是由弯曲辐射损耗和金属吸收损耗之间的平衡引起的。所提出的混合微环谐振器传感器的主要优点是占地面积小和灵敏度高,并且有可能以阵列形式集成在芯片上,以实现高效的芯片实验室生物化学传感应用。

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