The permanent magnetic linear contactless displacement (PLCD) sensor is a new type of displacement sensor operating on the magnetic inductive principle. It has many excellent properties and has already been used for many applications. In this article a Micro-PLCD sensor which can be used for microelectromechanical system (MEMS) measurements is designed and simulated with the CST EM STUDIO® software, including building a virtual model, magnetostatic calculations, low frequency calculations, steady current calculations and thermal calculations. The influence of some important parameters such as air gap dimension, working frequency, coil current and eddy currents etc. is studied in depth.
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机译:永磁线性非接触式位移(PLCD)传感器是一种基于磁感应原理的新型位移传感器。它具有许多优异的性能,并且已经被用于许多应用中。在本文中,使用CST EM STUDIO ® sup>软件设计并模拟了可用于微机电系统(MEMS)测量的Micro-PLCD传感器,包括建立虚拟模型,静磁计算,低频计算,稳定电流计算和热计算。深入研究了气隙尺寸,工作频率,线圈电流和涡流等重要参数的影响。
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