Numerical Study of the Thermal Model on High Uniformity Temperature Test Platform

摘要

The surface temperature uniformity of a test platform with an effective test area of 600 mm × 600 mm was numerically studied. The conductive heat transfer model for the test platform and the device under test (DUT) installed on the surface was established in the present work, as well as the radiation heat transfer model from the platform surface to the background temperature. The platform surface was divided into 5 or 9 regions where heated independently to make the surface temperature consistent. The temperature uniformity of these two partition designs was compared. The result shows that the 9 regions design has higher temperature uniformity at both target temperatures of -10°C and +45°C.