High-frequency piezoelectric displacement of PZT films measured using twin-beam laser doppler vibrometer

摘要

The high frequency (～100 kHz) dependence of Pb_1.1(Zr_0.53,Ti_0.47)O₃ (PZT) piezoelectric characteristics was investigated. PZT films were prepared onto Pt/Ti/SiO₂/Si substrates using a chemical solution deposition process. A twin-beam laser doppler equipment system was developed for determining the piezoelectric characteristics of a PZT film and simultaneously evaluating its polarization and displacement characteristics. Moreover, the sample temperature was changed from ?190°C to room temperature (RT). As the measurement frequency increased and the measurement temperature decreased, the remanent polarization (2 P _r) and coercive field (2 E _C) were observed to increase and the effective longitudinal piezoelectric constant ( d _33,Eff.) was observed to decrease.