Electrical Properties of Nano-TiO2 Thin Film Using Spin Coating Method

摘要

This work investigated the electrical properties of TiO2 thin film on empty glass and ITO glass by spin coating method. Highly transparent titanium oxide thin films were prepared on empty glass and Indium Tin Oxide (ITO) from a titanium (III) chloride precursor. The sheet resistance of the film prepared from both the synthesised and the commercially available TiO2 was measured by the Keithley four-point probe tester (KFPPT). A comparable sheet resistance of 10.69E + 00 Ω/sq was obtained on the ITO. The electrical conductivity of the TiO2 film on ITO glass substrate was found to be very high (3.46E + 05 Ω-1?cm-1) and comparable to that of the bare ITO glass.