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首页> 外文期刊>Journal of nanomaterials >Optimization of the Electrodeposition Parameters to Improve the Stoichiometry ofIn2S3Films for Solar Applications Using the Taguchi Method
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Optimization of the Electrodeposition Parameters to Improve the Stoichiometry ofIn2S3Films for Solar Applications Using the Taguchi Method

机译:使用Taguchi方法优化电沉积参数以提高In2S3薄膜的化学计量比

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摘要

Properties of electrodeposited semiconductor thin films are dependent upon the electrolyte composition, plating time, and temperature as well as the current density and the nature of the substrate. In this study, the influence of the electrodeposition parameters such as deposition voltage, deposition time, composition of solution, and deposition temperature upon the properties of In2S3films was analyzed by the Taguchi Method. According to Taguchi analysis, the interaction between deposition voltage and deposition time was significant. Deposition voltage had the largest impact upon the stoichiometry of In2S3films and deposition temperature had the least impact. The stoichiometric ratios between sulfur and indium (S/In: 3/2) obtained from experiments performed with optimized electrodeposition parameters were in agreement with predicted values from the Taguchi Method. The experiments were carried out according to Taguchi orthogonal array L27(3^4) design of experiments (DOE). Approximately 600 nm thick In2S3films were electrodeposited from an organic bath (ethylene glycol-based) containing indium chloride (InCl3), sodium chloride (NaCl), and sodium thiosulfate (Na2S2O3·5H2O), the latter used as an additional sulfur source along with elemental sulfur (S). An X-ray diffractometer (XRD), energy dispersive X-ray spectroscopy (EDS) unit, and scanning electron microscope (SEM) were, respectively, used to analyze the phases, elemental composition, and morphology of the electrodeposited In2S3films.
机译:电沉积的半导体薄膜的性质取决于电解质的组成,电镀时间和温度以及电流密度和基板的性质。在这项研究中,通过Taguchi方法分析了电沉积参数,例如沉积电压,沉积时间,溶液组成和沉积温度对In2S3薄膜性能的影响。根据田口分析,沉积电压和沉积时间之间的相互作用是显着的。沉积电压对In2S3薄膜化学计量的影响最大,沉积温度的影响最小。通过优化电沉积参数进行的实验获得的硫和铟之间的化学计量比(S / In:3/2)与Taguchi方法的预测值一致。根据田口正交阵列L27(3 ^ 4)实验设计(DOE)进行实验。在含有氯化铟(InCl3),氯化钠(NaCl)和硫代硫酸钠(Na2S2O3·5H2O)的有机浴(基于乙二醇的溶液)中电沉积约600 nm厚的In2S3膜,后者与元素一起用作额外的硫源硫(S)。 X射线衍射仪(XRD),能量色散X射线光谱仪(EDS)单元和扫描电子显微镜(SEM)分别用于分析电沉积In2S3薄膜的相,元素组成和形态。

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