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Laser Micro Machining of Alumina by a Picosecond Laser

机译:皮秒激光对氧化铝进行激光微加工

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In the present study aluminium oxide (Al2O3) has been micro structured through laser milling process using a Nd:YVO4 picosecond laser. A statistical approach based on Design of Experiments (DoE) has been successfully adopted with aim to detect which and how the process parameters af-fect the process as well as to explain the effect of the process parameters on the material removal rate and surface quality. The analysed parameters were scanning speed (Ss), power and line distance (i.e. the distance of two consecutive scan lines). The response variables were material removal rate and surface roughness. The ANalysis Of VAriance (ANOVA) has been applied to the results analy-sis. In order to understand the influence of main parameters and their interactions on the response variables, a Central Composite Design (CCD) has been chosen and performed successfully.
机译:在本研究中,氧化铝(Al2O3)已通过使用Nd:YVO4皮秒激光的激光铣削工艺进行了微结构化。已经成功采用了基于实验设计(DoE)的统计方法,目的是检测哪些工艺参数以及工艺参数如何影响工艺,并说明工艺参数对材料去除率和表面质量的影响。分析的参数是扫描速度(Ss),功率和行距离(即两条连续扫描线的距离)。响应变量是材料去除率和表面粗糙度。变异性分析(ANOVA)已应用于结果分析。为了了解主要参数及其相互作用对响应变量的影响,已选择并成功执行了中央复合设计(CCD)。

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