Laser Cleaning Technique Using Laser-induced Acoustic Streaming for Silicon Wafers [DOI: 10.2961/jlmn.2017.01.0001]

Chwan-Huei Tsai; Wen-Shiang Peng

首页> 外文期刊>Journal of Laser Micro/Nanoengineering >Laser Cleaning Technique Using Laser-induced Acoustic Streaming for Silicon Wafers [DOI: 10.2961/jlmn.2017.01.0001]

【24h】

Laser Cleaning Technique Using Laser-induced Acoustic Streaming for Silicon Wafers [DOI: 10.2961/jlmn.2017.01.0001]

机译：使用激光诱导声流的硅晶片激光清洁技术[DOI：10.2961 / jlmn.2017.01.0001]

获取原文

获取外文期刊封面封底 >>

开具论文收录证明 >>

文献代查 >>

团队文献服务 >>

页面导航

著录项
相似文献
相关主题

著录项

来源
《Journal of Laser Micro/Nanoengineering 》 |2017年第1期| 共5页
作者
Chwan-Huei Tsai; Wen-Shiang Peng;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种
中图分类光学 ;
关键词

相似文献

外文文献
中文文献
专利

1. Potential use of laser-induced breakdown spectroscopy combined laser cleaning for inspection of particle defect components on silicon wafer [J] . Lituo Liu, Guannan Li, Weihu Zhou, Journal of microanolithography, MEMS, and MOEMS . 2019 ,第3期

机译：潜在使用激光诱导击穿光谱法结合激光清洗技术检查硅片上的颗粒缺陷成分
2. Post-chemical mechanical polishing cleaning of silicon wafers with laser-induced plasma [J] . Vamsi Krishna Devarapalli, Ying Li, Cetin Cetinkaya Journal of Adhesion Science and Technology: The International Journal of Theoredtical and Basic Aspects of Adhesion Science and Its Applications in All Areas of Technology . 2004 ,第7期

机译：用激光诱导的等离子体对硅晶片进行化学后机械抛光清洁
3. Acoustic emission monitoring during laser shock cleaning of silicon wafers [J] . T. Kim, J.M. Lee, S.H. Cho, Optics and Lasers in Engineering . 2005 ,第9期

机译：硅片激光冲击清洗过程中的声发射监测
4. STEAM LASER CLEANING OF SILICON SURFACES: LASER-INDUCED GAS BUBBLE NUCLEATION AND EFFICIENCY MEASUREMENTS [C] . P. Leiderer, M. Mosbacher, V. Dobler, Laser Cleaning: Optical Physics, Applied Physics and Materials Science . 2002

机译：硅表面的蒸汽激光清洁：激光诱导的气泡成核和效率测量
5. Non-invasive thermal profiling of silicon wafer surface during RTP using acoustic and signal processing techniques. [D] . Syed, Ahmed Rashid. 2000

机译：使用声学和信号处理技术，在RTP过程中对硅晶片表面进行非侵入式热分析。
6. Improvement of polycrystalline silicon wafer solar cell efficiency by forming nanoscale pyramids on wafer surface using a self-mask etching technique [O] . Hsin-Han Lin, Wen-Hwa Chen, Franklin C.-N. Hong -1

机译：通过使用自掩膜蚀刻技术在晶圆表面形成纳米级金字塔提高多晶硅晶圆太阳能电池效率
7. The Cleaning Technology Using the D.I. Water for SMT. The Cleaning Techniques of Silicon Wafers Using the D.I. Water for ULSI Fabrication Process. [O] . Teruhito Ohnishi, Yuichi Hirofuji 1991

机译：使用D.I的清洁技术。 SMT的水。使用D.I的硅晶片的清洁技术。 Ulsi制造过程的水。

Laser Cleaning Technique Using Laser-induced Acoustic Streaming for Silicon Wafers [DOI: 10.2961/jlmn.2017.01.0001]

著录项

相似文献

相关主题

期刊订阅