R&D of Gas-Based Laser Plasmas toward Material Processing

摘要

Research and developments of gas-based laser plasmas toward material processing are reported. Transmission of plasmas, ultraviolet spectra, photo-excitation on glass material, and sterilization performance of gas-based laser plasmas using a gas-puff and a gas cell targets are evaluated. A co- axial gas-puff target as a intense VUV source and an evaluating method of refractive index changes of glass surface during the photo-excitation are developed toward LPAD.