High Speed Laser Micro Processing Using High Brilliance Continuous Wave Laser Radiation

摘要

Laser micro processing using a high power single-mode continuous wave fibre laser in combina-tion with a fast galvanometer scanner as well as an ultra fast polygon scan systems was investigated. As a key technology in high rate laser ablation a maximum laser power up to 3 kW and scan speeds up to 18,000 m/min were applied. With the ultra fast laser beam deflection and a small laser focal spot diameter of 21 μm laser dwell times less than 100 nanoseconds were achieved. As a result laser intensities comparable to the q-switched lasers in the range of 108 W/cm2 were irradiated on stain-less steel, copper, and tungsten. The paper discusses the influence of the significant laser processing parameters, such as laser power, scan speed and scan number, on the ablation rate and the machining qualities. Furthermore initial ablation structures and micro-slits will be presented.