IMPROVING SENSITIVITY OF In2O3 AGAINST NO2 TOXIC GAS BY LOADING TIN OXIDE

摘要

The paper discusses the structural and optical properties of In2O3 and In2O3-SnO2 gas sensor thin films were deposited on glass and silicon substrates and grown by irradiation of assistant microwave on seeded layer nucleated using spin coating technique. The X-ray diffraction revealed a polycrystalline nature of the cubic structure. Atomic Force Microscopy (AFM) used for morphology analysis that shown the grain size of the prepared thin film is less than 100 nm, surface roughness and root mean square for In2O3 where increased after loading SnO2, this addition is a challenge in gas sensing application. Sensitivity of In2O3 thin film against NO2 toxic gas is 35% at 300oC. Sensing properties were improved after adding Tin Oxide (SnO2) to be more than 800% at 200oC. So, higher sensitivity with lowering operating temperature is obtained by SnO2 addition. The results revealed fast response and recovery times with increasing operating temperatures.