Focussed ion beam fabrication of large and complex nanopatterns

摘要

The fabrication of nanopatterns with a focussed ion beam (FIB) has recently been expanded to more complex nanopatterns with large numbers of individual pattern elements and covering larger pattern areas. We present two examples of FIB-fabricated large and complex nanopatterns and describe the key aspects of the underlying process automation. The FIB-fabrication has been carried out on DualBeam? instruments, which combine the FIB with a scanning electron microscope in one single instrument. We also present examples on how FIB-cross-sectioning and high-resolution electron microscopy can be applied to characterise the just fabricated nanopatterns in great detail.