Influence of Gas Flow Rate on the Deposition Rate on Stainless Steel 202 Substrates

摘要

Solid thin films have been deposited on stainless steel 202 (SS 202) substrates at different flow rates of natural gas using a hot filament thermal chemical vapor deposition (CVD) reactor. In the experiments, the variations of thin film deposition rate with the variation of gas flow rate have been investigated. The effects of gap between activation heater and substrate on the deposition rate have also been observed. Results show that deposition rate on SS 202 increases with the increase in gas flow rate within the observed range. It is also found that deposition rate increases with the decrease in gap between activation heater and substrate. In addition, friction coefficient and wear rate of SS 202 sliding against SS 304 under different sliding velocities are also investigated before and after deposition. The experimental results reveal that improved friction coefficient and wear rate is obtained after deposition than that of before deposition.