Model based in-process monitoring with optical coherence tomography

摘要

The demands on in-process 3D monitoring in ceramic micromanufacturing industry require a high-precision, non-destructive, rapid and automated inspection technique for measuring the thickness of component layer, determining the shape and dimensions of the embedded 3D structures, and detecting the de-bonding, cracks, warping and deformation. One of the promising metrology techniques is optical coherence tomography (OCT). With the dedicated image processing algorithm and the industrial product data exchange standard, the model-based integration of OCT as a new metrology tool is demonstrated. As a generic standard for any product or manufacturing information, ISO 10303 STEP AP242 is employed for the measured data model. Unambiguous data representation is achieved by integrating additional modelling constraints. The proposed framework allows fully using the technical advantages of OCT to in-process 3D monitoring.