Nanostructured Mo-B-C coatings

摘要

Microstructure and mechanical properties of thin Mo-B-C layers preparedby magnetron sputtering were studied by means of scanning and transmission electronmicroscopy and nanoindentation techniques. Depending on sputtering conditions themicrostructure changes from amorphous to partly crystalline. No cracks wereobserved at the substrate-layer interface under indentation prints. The materialsshowed a promising combination of high hardness and elastic modulus together withhigh fracture toughness.