Preparation of Cr&sub&2&/sub&O&sub&3&/sub&-Ta&sub&2&/sub&O&sub&5&/sub& Composites Using RF Magnetron Sputtering

摘要

We prepared Cr 2 ) O 3 ) -Ta 2 ) O 5 ) composite films using our RF magnetron co-sputtering method for the first time. X-ray diffraction (XRD) patterns and photoluminescence (PL) spectra of the films annealed at 700℃, 800℃, 900℃, and 1000℃ were evaluated. From their XRD patterns, the Cr 2 ) O 3 ) -Ta 2 ) O 5 ) film annealed at 700℃ seemed to be almost amorphous, and the one annealed at 800℃ seemed to be hexagonal Ta 2 ) O 5 ) doped with Cr. In addition, the Cr 2 ) O 3 ) -Ta 2 ) O 5 ) films annealed at 900℃ and 1000℃ seemed to include tetragonal CrTaO 4 ) phases. Furthermore, it seems that almost no defect exists in our Cr 2 ) O 3 ) -Ta 2 ) O 5 ) composite films annealed at 700℃ - 1000℃ because their PL spectra have no defect-related peak. We thus find that good-quality?Cr 2 ) O 3 ) -Ta 2 ) O 5 ) composite films including CrTaO 4 ) can?be obtained using our very simple co-sputtering method and subsequent annealing above 900℃.