Optical sensing technique for Young?s modulus measurementsin piezoelectric materials

摘要

In the design of microsensors using microelectromechanical system (MEMS) technology, it is necessary to know the elastic properties ofthe materials employed in their fabrication. Reliable mechanical properties of the materials are critical to the safety and correct functioningof these microdevices. Mechanical testing of microstructures that are only a few microns thick requires novel techniques and specializedprocedures for preparation and handling. In this paper a simplified optic sensing is used to measure the Young?s modulus in piezoelectriccantilever. This optical technique was chosen because it is the most appropriate when working with small devices, besides being easilyimplemented and low cost