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Dynamic Study of Carbon Nanotubes Production by Chemical Vapor Deposition of Alcohols

机译:醇化学气相沉积生产碳纳米管的动态研究

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The rate of deposition of carbon nanotubes, their purity and wall thickness was investigated employing different Chemical Vapor Deposition (CVD) processes. Two catalysts, consisting of Al2O3 and Fe2O3 of variable composition, were used, while the carbon precursor was an alcohol (ethanol or methanol). The experiments were carried out in a thermogravimetric CVD reactor which enables continuous monitoring of the evolution of the mass of carbon with time. The final product was analyzed using Scanning Electron Microscopy and Raman Spectroscopy. It was found that product purity and wall thickness was depended on process temperature, the carbon precursor, the concentration of Fe2O3 in the catalyst and the use of hydrogen for catalyst reduction, before or during deposition.
机译:使用不同的化学气相沉积(CVD)工艺研究了碳纳米管的沉积速率,纯度和壁厚。使用了由组成可变的Al 2 O 3 和Fe 2 O 3 组成的两种催化剂,而碳前体是醇(乙醇或甲醇)。实验是在热重CVD反应器中进行的,该反应器能够连续监测碳质量随时间的变化。使用扫描电子显微镜和拉曼光谱法分析最终产物。发现产物纯度和壁厚取决于工艺温度,碳前驱体,催化剂中Fe 2 O 3 的浓度以及催化剂中氢的使用在沉积之前或期间进行还原。

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