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Grand Challenges and Relevant Failure Mechanisms of Nanoelectronic Devicesfull text in English

机译:纳米电子器件的巨大挑战和相关的失效机制全文

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MEMS and NEMS applications under development today encompass the fields of automotive spacecraftcomponents in the form of sensors and actuators, military applications, biomedical applications, etc. As westep into deep nanometre arena, major reliability issues arise; it becomes imperative to critically review theissues that the new age has brought with itself. The operation of those materials is critical for the success ofthe mission, and oft unreliable. Understanding their behaviour is important for further development of morecomplicated and multi-functional micro- and nanosystems. The process of changing one thing at a time, whileholding everything else constant, has served the microelectronics industry very well, and it is not likely to beabandoned.
机译:目前正在开发的MEMS和NEMS应用涵盖传感器和致动器形式的汽车航天器组件,军事应用,生物医学应用等领域。随着我们进入深纳米领域,出现了主要的可靠性问题;必须严格审查新时代带来的问题。这些材料的操作对任务的成功至关重要,而且常常不可靠。了解它们的行为对于进一步开发更复杂和多功能的微米和纳米系统非常重要。在保持其他所有内容不变的情况下,一次更改一件事情的过程为微电子行业提供了很好的服务,而且也不太可能被放弃。

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