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Influence of Crucible Thermal Conductivity on Crystal Growth in an Industrial Directional Solidification Process for Silicon Ingots

机译:坩埚导热率对硅锭工业定向凝固过程中晶体生长的影响

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We carried out transient global simulations of heating, melting, growing, annealing, and cooling stages for an industrial directional solidification (DS) process for silicon ingots. The crucible thermal conductivity is varied in a reasonable range to investigate its influence on the global heat transfer and silicon crystal growth. It is found that the crucible plays an important role in heat transfer, and therefore its thermal conductivity can influence the crystal growth significantly in the entire DS process. Increasing the crucible thermal conductivity can shorten the time for melting of silicon feedstock and growing of silicon crystal significantly, and therefore large thermal conductivity is helpful in saving both production time and power energy. However, the high temperature gradient in the silicon ingots and the locally concave melt-crystal interface shape for large crucible thermal conductivity indicate that high thermal stress and dislocation propagation are likely to occur during both growing and annealing stages. Based on the numerical simulations, some discussions on designing and choosing the crucible thermal conductivity are presented.
机译:我们对硅锭的工业定向凝固(DS)工艺进行了加热,熔化,生长,退火和冷却阶段的瞬态全局仿真。坩埚热导率在合理范围内变化,以研究其对整体传热和硅晶体生长的影响。发现坩埚在热传递中起着重要作用,因此,其热导率可以在整个DS过程中显着影响晶体的生长。增大坩埚的导热率可以显着缩短硅原料熔化和硅晶体生长的时间,因此,较大的导热率有助于节省生产时间和电能。但是,对于大的坩埚热导率,硅锭中的高温梯度和局部凹入的熔融晶体界面形状表明,在生长和退火阶段都可能发生高热应力和位错传播。在数值模拟的基础上,对坩埚导热系数的设计和选择进行了讨论。

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