Abstract: This paper reports the design, fabrication, and results of thin film Fabry-Perot interferometer (FPI) for mid-infrared spectroscopy application. The system is designed to be integrated in a small portable spectrometer for the measurement of molecular absorption or emission as well as substance that has an infrared signature. The filter is based on Fabry-Perot interferometer and the wavelength of interest is in the mid-infrared (5 to 15 micrometers). The layers were selected carefully to minimize the thickness required to meet the quarter-wave optical-thickness criteria for the interferometer.
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