Development of Textured Al-doped Zinc oxide on the Glass Substrate with Pit Arrays for Thin Film Silicon Solar Cells

摘要

Light trapping structure can increase the absorption of incident light. In this paper, we make used ofporous anodic aluminum oxide as mask to fabricate the light trapping structure on the glass substratebefore AZO film deposition. The average size of the pit is about 2 and 1μm, respectively. It was foundthat the efficiency of the n-i-p solar cells using AZO film with pit arrays as back surface reflectors haveobvious improvement. Furthermore, we improved the external quantum efficiency of the solar cells inthe infrared region.