Comportamiento estructural y morfológico de películas delgadas de bismuto obtenidas a través de sputtering con magnetrón DC

摘要

BismuththinfilmsweregrownontoglasssubstratesthroughtheDCmagnetronsputteringtechnique.Theeffectsofsubstratetemperatureonthemicrostructureofthefilmswereevaluated.ThestructuralbehaviorwasanalyzedviaX#45;raydiffraction,anditshowedamarkedinfluenceofthesubstratetemperatureonthecrystallitesizeandthemicro#45;stress.ThemorphologiesevaluatedthroughElectronProbeMicro#45;analyzerimagesindicatedaslightdifferenceinthegrainsizewithanincreaseintemperatureaswellasasignificantincreaseinsurfaceroughness,accordingtoprofilometermeasurements./font