Structural and Photoluminescence Studies of Rutile TiO₂ Nanorods Prepared by CBD Method on Si Substrates

摘要

In this work, nanoflower arrays of rutile TiO₂ composed of nanorods were fabricated on p-type (111)-oriented silicon substrates and, all substrates were seeded with a TiO₂ seed layer synthesized by radio-frequency reactive magnetron sputtering system. Chemical bath deposition (CBD) was carried out to grow rutile TiO₂ nanorods on Si substrate. Raman spectroscopy, X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) analyses showed the tetragonal rutile structure of the synthesized TiO₂ nanorods. Optical properties were examined by photoluminescence spectroscopy. The spectra exhibit one strong UV emission peak. Which can be seen at around 396 nm. In the visible region, TiO₂ demonstrated two dominant PL emissions centered at around 528 and 705 nm. The experimental results showed that the CBD method enabled the formation of photosensitive, high-quality rutile TiO₂ nanorods with few defects for humidity sensor and in future optoelectronic nanodevice applications.