Optical Measurements of an Atmospheric Pressure Microplasma Jet Aiming Surface Treatment

摘要

In this work stable non-thermal ac high voltage atmospheric pressure microplasma jet (APMJ) device was used for optical and electrical characterizations. It enables the generation of low power (~5W) microplasma jet at frequency of 60Hz. The jet has a visible radial diameter of approximately 1.5 mm. Optical emission spectroscopy was used as a diagnostic tool to determine the gas discharge parameters as the modes temperature. The rotational temperature of OH radicals at the exit nozzle varies from 325 to 525K for different gases where the electrical input power ranged from 3 to 10W. Both the electronic (0.5 – 0.7eV) and vibrational temperatures (0.35 – 0.58eV) were estimated at the same power conditions for Ar, He, N_(2), air and O_(2) + 1%Ar flow rates. The highly reactive species as OH, O, N_(2)~(+ )~( )and the energetic photons produced between the electrodes extent along the plasma plume, both in radial and axial direction from the exit of the APMJ.