Effects of background gas on sulfur hexafluoride removal by atmospheric dielectric barrier discharge plasma

摘要

The effects of background gases (He, Ar, N₂ and air) on SF₆ removal in a dielectric barrier reactor were investigated at atmospheric pressure. A comparison among these background gases was performed in terms of discharge voltage, discharge power, mean electron energy, electron density, removal efficiency and energy yield for the destruction of SF₆. Results showed that the discharge voltage of He and Ar was lower than that of N₂ and air, but the difference of their discharge power was small. Compared with three other background gases, Ar had a relatively superior destruction and removal rate and energy yield since the mean electron energy and electron density in SF₆/H₂O/Ar plasma were both maintained at a high level. Complete removal of 2% SF₆ could be achieved at a discharge power of 48.86 W with Ar and the corresponding energy yield can reach 4.8 g/kWh.