The hybrid hexapod enables applications that can benefit from six-deqrees-of-freedom motion. Technology advancements ranging from the design and manufacturing of next-generation consumer electronics to more efficient and reliable manufacturing processes, to improved metrology sensors, continually drive the need for motion control systems with higher accuracy, improved repeatability, and better geometric (i.e. 3D) performance. In complex applications where high-precision, six-degrees-of-freedom of motion is required (X, Y, Z, pitch, yaw, roll), a hexapod is commonly used, as it offers compact size and reduced errors relative to serial stacked stages. However, hexapods are not without their limitations that themselves can limit the level of precision that can be attained. A hybrid hexapod~® system is an innovative motion system that improves on existing hexapod technology, while eliminating inherent weaknesses of traditional hexapods. As a result, the hybrid hexapod achieves nanometer level performance with respect to accuracy, repeatability, and geometric 3D performance. Also known as Stewart platforms or parallel kinematic manipulators (PKM), hexapods are devices where six links or actuators (that extend and retract) join a stationary bottom plate with a top plate that performs coordinated motion in six degrees of freedom (see figure 1). A sample, fixture, sensor, or any device can be mounted to the top plate and be manipulated to be in any location and orientation in the available range of travel.
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